Creator:

Javidinejad, Amir

Contributor:

Jurczak, Paweł - red.

Title:

Application of anisotropic thin plate theory for development of displacements for Silicon <111> crystals plates in cylindrical systems

Group publication title:

IJAME, volume 21 (2016)

Subject and Keywords:

transverse isotropic ; thin plate elasticity ; FEA ; pressure diaphragm ; anisotropic

Abstract:

Silicon <111> crystal is one of the crystal orientations, which shows potential for application in micro device developments of pressure diaphragms for measurement purposes. To date, no theoretical basis has been examined to develop the deflections for computational analysis purposes [1]. This paper presents the development of the diaphragm deflections for Silicon <111> Crystal in Cylindrical coordinates system. The Silicon <111> crystal possesses transverse isotropic properties. Thus, an anisotropic thin plate theory is used here to develop the plate deflection. A numerical example is given to compare the theoretical results with Finite Element Analysis (FEA) results.

Publisher:

Zielona Góra: Uniwersytet Zielonogórski

Date:

2016

Resource Type:

artykuł

Format:

application/pdf

DOI:

10.1515/ijame-2016-0052

Pages:

879-890

Source:

IJAME, volume 21, number 4 (2016)

Language:

eng

License:

CC 4.0

License CC BY-NC-ND 4.0:

click here to follow the link

Rights:

Biblioteka Uniwersytetu Zielonogórskiego